Ion Mill Rate Calculator

Material:
Throw Distance [cm]:
Beam Voltage [V]:
Beam Current [mA]:
Mill Rate [nm/min]:

This calculator utilizes the information published on this website to estimate the milling rates for various materials. The equation used to by the calculator is:
     R = Is(Td) * (Ib/120) * Rmaterial(Vb),
where R is the mill rate in [nm/min], Is is the ion source current density in [mA/cm2] measured at a distance Td, Ib is the programmed ion beam current in [mA], and Rmaterial is the material mill rate in [nm/min] when the ion beam voltage is Vb. Ib is scaled by 120 [mA] because that is the condition used when measuring Is(Td).